Makabe T. Plasma Electronics. Applications in Microelectronic Device...3ed 2026

Textbook in PDF format More than two decades have passed since the first edition of Plasma Electronics was published. Today, we are entering an era that demands increasingly sophisticated control and design of plasma sources and related surface technologies for micro- and nano-electronic device fabrication. Plasma technology, based on surface interactions, continues to expand into emerging fields including biotechnology, medical science, and environmental applications

Piece size

Not available yet

Piece count

Not available yet

Metadata origin

APIBay / The Pirate Bay public index

Trackers

5

Swarm measured

5 Aug 2026, 16:33 UTC

Swarm source

APIBay snapshot